May, Gary S <br/><br/>
Fundamentals of Semiconductor Fabrication  Eng 
May, Gary S 
 - New York  John Wiley & Sons  2004 
 - xiii, 305 p. :  24 cm 
<br/><br/><label>ISBN: </label>981253072x 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electrical Engineering
<br/><br/><label>Dewey Class. No.: </label>621.38152   / MAY-F 2004 5564